论文信息 - Progress towards a MEMS tunable infrared filter using porous silicon

Progress towards a MEMS tunable infrared filter using porous silicon

The unique optical properties of porous silicon show it to be a promising material for imaging and spectroscopy in the mid-infrared and long-infrared wavelength ranges. A tunable MEMS filter using porous silicon as a high-reflectivity layer is proposed. Measurements on fabricated porous silicon-based distributed Bragg reflectors and Fabry-Perot etalons are presented.

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