论文信息 - Effect of the substrate temperature on the deposition of hydrogenated amorphous carbon by PACVD at 35 kHz - 字舞流文

Effect of the substrate temperature on the deposition of hydrogenated amorphous carbon by PACVD at 35 kHz

J. Albella | J. Räisänen | R. Gago | A. Climent-Font | E. Rauhala | O. Sánchez-Garrido | E. Román