Ultra compact CMOS-MEMS oscillator based on a reliable metal-via MEMS resonators with noise-matched high-gain transimpedance CMOS amplifier

In this paper we present a high-transimpedance, low-noise and noise-matched pre-amplifier for integrated CMOS-MEMS sensing devices. The thermomechanical noise of a MEMS resonator has been characterized under atmospheric conditions in order to prove the low input noise of the designed transimpedance pre-amplifier. Results of the CMOS-MEMS system in a Pierce oscillator configuration demonstrates the lowest floor noise reported until now in a capacitively coupled CMOS-MEMS oscillator.

[1]  Elad Alon,et al.  A 78-microwatt GSM phase noise-compliant pierce oscillator referenced to a 61-MHz wine-glass disk resonator , 2013, 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC).

[2]  M. Roukes,et al.  Frequency fluctuations in silicon nanoresonators , 2015, Nature nanotechnology.

[3]  Ming-Huang Li,et al.  A Sub-150- $\mu \text{W}$ BEOL-Embedded CMOS-MEMS Oscillator With a 138-dB $\Omega $ Ultra-Low-Noise TIA , 2016, IEEE Electron Device Letters.

[4]  Arantxa Uranga,et al.  Single-Resonator Dual-Frequency BEOL-Embedded CMOS-MEMS Oscillator With Low-Power and Ultra-Compact TIA Core , 2017, IEEE Electron Device Letters.

[5]  Reza Abdolvand,et al.  Single-resonator dual-frequency AIN-on-Si MEMS oscillators , 2015, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

[6]  Reza Abdolvand,et al.  A 76 dB$\Omega $ 1.7 GHz 0.18 $\mu$ m CMOS Tunable TIA Using Broadband Current Pre-Amplifier for High Frequency Lateral MEMS Oscillators , 2011, IEEE Journal of Solid-State Circuits.

[7]  C.T.-C. Nguyen,et al.  Series-resonant VHF micromechanical resonator reference oscillators , 2004, IEEE Journal of Solid-State Circuits.

[8]  Arantxa Uranga,et al.  A monolithically integrated torsional CMOS-MEMS relay , 2016 .

[9]  C. Nguyen,et al.  MEMS technology for timing and frequency control , 2005, Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005..

[10]  Arantxa Uranga,et al.  CMOS-MEMS resonators , 2015 .

[11]  Thomas W. Kenny,et al.  Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators , 2007 .

[12]  Ashwin A. Seshia,et al.  A vacuum packaged surface micromachined resonant accelerometer , 2002 .