Silicon planar refractive lenses with the optimized design

Abstract Silicon planar parabolic refractive lenses including lenses with minimized absorption are created by the microfabrication technique. Focusing properties of the lenses were studied with synchrotron radiation in the X-ray energy range of 8–25 keV at the ESRF. The intensity transmission of a lens with minimized absorption is two times greater than that of simple parabolic lenses at 8 keV and in the X-ray energy range over 15 keV it exceeds 90%. Spectral and heatload properties of lenses with minimized absorption are discussed in detail.