论文信息 - Tunable bandstop MEMS filter for millimetre-wave applications

Tunable bandstop MEMS filter for millimetre-wave applications

The design and realisation of original millimetre-wave tunable bandstop filters using MEMS (micro-electro-mechanical-systems) technology for millimetre-wave applications is presented. The tunable behaviour is achieved by using MEMS switches. The overall structures, including the MEMS switches, have been manufactured using dielectric membrane in order to minimise the dielectric losses. Experimental validations are reported and validate the proposed topology: the bandstop frequency is shifted by approximately 3.5 GHz in V-band when the switches are actuated.

[1] P. Pons,et al. Miniature coplanar bandstop filter for Ka-band applications based on original resonant coupling irises topology , 2004 .

[2] P. Pons,et al. Tunable MEMS Filters for Millimeter Wave Applications , 2006, 2006 International Semiconductor Conference.

[3] R. Simons. Coplanar waveguide circuits, components, and systems , 2001 .

[4] T.M. Weller,et al. Miniature stub and filter designs using the microshield transmission line , 1995, Proceedings of 1995 IEEE MTT-S International Microwave Symposium.

[5] K. A. Jose,et al. RF MEMS and Their Applications , 2002 .

[6] Gabriel M. Rebeiz. RF MEMS: Theory, Design and Technology , 2003 .

[7] Mohamed Saadaoui. Optimisation des circuits passifs micro-ondes suspendus sur membrane diélectrique , 2005 .