Robust design procedure for dielectric resonator metasurface lens array.

In this paper, we present a design strategy for single layer metasurface lenses based on dielectric resonators. This strategy is based on a robust optimization procedure for the resonator distribution in order to meet required performances (e.g. encircled energy, bandwidth, field of view, etc.). Possible deviations due to manufacturing errors are taken into account in the design procedure. This is applied to the design of array of microlenses for maskless lithography applications. The final design shows more uniform focusing performances (bandwidth 20 nm at 395 nm - 415 nm, field of view ±60 mrad) and increased robustness against manufacturing errors, compared to designs based on analytic phase projections.

[1]  A. Arbabi,et al.  Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays , 2014, Nature Communications.

[2]  Zi-Lan Deng,et al.  A facile grating approach towards broadband, wide-angle and high-efficiency holographic metasurfaces. , 2016, Nanoscale.

[3]  Seyedeh Mahsa Kamali,et al.  Multiwavelength polarization insensitive lenses based on dielectric metasurfaces with meta-molecules , 2016, 1601.05847.

[4]  F. Abelès,et al.  Temperature dependence of the dielectric function of silicon using in situ spectroscopic ellipsometry , 1993 .

[5]  Arnan Mitchell,et al.  Dielectric resonator nanoantennas at visible frequencies. , 2013, Optics express.

[6]  G. Gerini,et al.  Optical antennas for far and near field metrology , 2016, 2016 10th European Conference on Antennas and Propagation (EuCAP).

[7]  G. Gerini,et al.  Nanoresonator based dielectric surfaces for light manipulation , 2015, 2015 10th European Microwave Integrated Circuits Conference (EuMIC).

[8]  Marc Ilegems,et al.  Infrared Lattice Vibrations and Free-Electron Dispersion in GaN , 1973 .

[9]  I. Malitson.  Interspecimen Comparison of the Refractive Index of Fused Silica , 1965 .

[10]  Derek Abbott,et al.  Dielectric Resonator Reflectarray as High-Efficiency Nonuniform Terahertz Metasurface , 2016 .

[11]  Yuri S. Kivshar,et al.  High‐Efficiency Dielectric Huygens’ Surfaces , 2015 .

[12]  Arka Majumdar,et al.  Low contrast dielectric metasurface optics , 2016, 2016 Conference on Lasers and Electro-Optics (CLEO).

[13]  P. R. West,et al.  All-dielectric Subwavelength Metasurface Focusing Lens References and Links , 2022 .

[14]  Zi-Lan Deng,et al.  Wide-angled off-axis achromatic metasurfaces for visible light. , 2016, Optics express.

[15]  Marco Fiorentino,et al.  Sub-Wavelength Grating Lenses With a Twist , 2014, IEEE Photonics Technology Letters.

[16]  Carl-Edward Joseph Dippel.  Using particle swarm optimization for finding robust optima , 2010 .

[17]  P. Genevet,et al.  Multiwavelength achromatic metasurfaces by dispersive phase compensation , 2014, Science.

[18]  A. Arbabi,et al.  Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission. , 2014, Nature nanotechnology.