论文信息 - MoO3-based sputtered thin films for fast NO2 detection

MoO3-based sputtered thin films for fast NO2 detection

Abstract The authors report about preparation and characterization of thin films of MoO3 as a material for gas-sensing applications. Structural investigation of the films is carried out by electron microscopy and X-ray diffraction techniques. The sensing behavior of the MoO3 films was tested to NO2, showing capability to detect a few ppm of NO2 with considerably short response time.

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