论文信息 - SiGe micro-cooler

SiGe micro-cooler

Thin film SiGe heterostructure coolers have been fabricated and characterised. Cooling by as much as 1.1 K at room temperature and 1.6 K at a substrate temperature of 70/spl deg/C over a 3 /spl mu/m Si/SiGe superlattice barrier has been measured. This corresponds to cooling power densities of hundreds of watts per square centimetre.

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