Surface Acoustic Wave Sensors for Ammonia Detection at Room Temperature Based on SnO2/Co3O4 Bilayers

The selectivity of a SAW (surface acoustic wave) sensor, with a Co3O4 sensitive thin film for NH3 (ammonia) and the influence of SnO2 on its sensitivity, was studied. Thin films were deposited by pulsed laser deposition (PLD) on quartz SAW sensor substrates. Two sensors with different types of sensitive films were developed: a Co3O4 thin film sensor (S1) and a SnO2/Co3O4 thin film sensor (S2). The sensitive films were deposited in conditions which ensured a porous structure. The sensors were tested in the presence of three gases: NH3, methanol, and toluene. The selectivity of Co3O4 for NH3 was determined from the difference in the frequency shifts of the sensor for NH3 and for VOCs (volatile organic compounds). The positive influence of SnO2 on the sensitivity of sensor S2 was observed from the lower limit of detection (LOD) of this sensor and from the differences in frequency shifts between sensor S1 and sensor S2.

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