Ultra-high-frequency temperature-compensated oscillators based on ovenized AlN contour-mode MEMS resonators

This work demonstrates the possibility of achieving good temperature stability in ultra-high frequency AlN MEMS CMR based oscillators by means of resonator ovenization. This technique results in low power consumption, fast turn-on time, and good short term stability. Over the temperature range -45 ÷ 85 °C, the 582 MHz oscillator exhibits a temperature stability as good as 125 ppm (limited by the electronic circuitry) and stable phase noise values better than -93 dBc/Hz at 1 kHz, and -160 dBc/Hz at 10 MHz offsets.

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