Time domain simulation and measurements for piezoelectric bimorphs
暂无分享,去创建一个
[1] C. Quate,et al. Atomic resolution with an atomic force microscope using piezoresistive detection , 1993 .
[2] H. Tzou. Piezoelectric Shells: Distributed Sensing and Control of Continua , 1993 .
[3] Pin Lu,et al. An alternative derivation of dynamic admittance matrix of piezoelectric cantilever bimorph , 2003 .
[4] S A Jade,et al. Measurement of elastic modulus s(11)(D) of thin film ZnO by resonance method. , 1999, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.
[5] S. Ballandras,et al. Finite element analysis of the behavior of the scanning microdeformation microscope , 2001, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[6] Don L. DeVoe,et al. Piezoelectric thin film micromechanical beam resonators , 2001 .
[7] L. Eyraud,et al. Piezoelectric bimorph bending sensor for shear-stress measurement in fluid flow , 1996 .
[8] J. G. Smits,et al. Dynamic admittance matrix of piezoelectric cantilever bimorphs , 1994 .
[9] S. H. Crandall. The role of damping in vibration theory , 1970 .
[10] George T.-C. Chiu,et al. Institute of Physics Publishing Journal of Micromechanics and Microengineering Modeling and Control of Piezoelectric Cantilever Beam Micro-mirror and Micro-laser Arrays to Reduce Image Banding in Electrophotographic Processes , 2022 .
[11] W. E. Baker,et al. Air and internal damping of thin cantilever beams , 1967 .
[12] L. Meirovitch. Principles and techniques of vibrations , 1996 .
[13] B. Auld,et al. Acoustic fields and waves in solids , 1973 .
[14] Madan Dubey,et al. Surface micromachined piezoelectric resonant beam filters , 2001 .
[15] Antonio Iula,et al. A piezoelectric bimorph static pressure sensor , 1995 .
[16] N. D. Rooij,et al. Micromachined atomic force microprobe with integrated capacitive read-out , 1992 .
[17] H. Tiersten. Linear Piezoelectric Plate Vibrations: Elements of the Linear Theory of Piezoelectricity and the Vibrations Piezoelectric Plates , 1969 .
[18] Y. Eugene Pak,et al. Five-port equivalent electric circuit of piezoelectric bimorph beam , 2000 .
[19] C. W. Bert,et al. Material damping - An introductory review of mathematical models, measures and experimental techniques. , 1973 .
[20] Yu Wang,et al. Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers , 2003 .
[21] Charles W. Bert,et al. Material damping: An introductory review of mathematic measures and experimental technique , 1973 .
[22] Kukjin Chun,et al. Fabrication of an electrostatic track-following micro actuator for hard disk drives using SOI wafer , 2001 .
[23] Paul Gonnard,et al. Modelling of a cantilever non-symmetric piezoelectric bimorph , 2003 .