论文信息 - Permittivity Measurement of Ferroelectric Thin Film Based on CPW Transmission Line

Permittivity Measurement of Ferroelectric Thin Film Based on CPW Transmission Line

The complex permittivity measurement of ferroelectric thin film is discussed in this paper. Considering the small thickness of ferroelectric thin film, the CPW (coplanar waveguide) with material under test (MUT) deposited on the Al2O3 is used as measurement configuration. The propagation constant is calculated and the complex permittivity of the MUT is extracted from effective permittivity by using SVR (support vector regression) method. The results show that the errors of both real part and imaginary part of the permittivity (ε′r and ε′′r ) are less than 1%.

Bo Zhang | Yuehang Xu | Zongxi Tang | Yunqiu Wu | X. He

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