A novel meandered coplanar waveguide for RF microelectromechanical systems

A novel meandered coplanar waveguide was designed and fabricated through MEMS technology. This transmission line uses a meandered design which is helpful for minimizing the whole size of microwave components. Compared with the conventional CPW, the thickened ground lines can improve the distribution of the electric field which can reduce the attenuation and the line impedance. Its return loss has two minimal values over a frequency range from 5 GHz to 20 GHz and their positions can be adjusted. The fabrication process of the meandered CPW is much simpler than other improved CPW structures.