Which PZT thin films for piezoelectric microactuator applications
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Paul Muralt | P. Muralt | M. Dubois | D. V. Taylor | S. Hiboux | Stephane Hiboux | Marc-Alexandre Dubois
[1] I. Kanno,et al. PIEZOELECTRIC PROPERTIES OF C-AXIS ORIENTED PB(ZR,TI)O3 THIN FILMS , 1997 .
[2] Paul Muralt,et al. Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions , 1996 .
[3] Paul Muralt,et al. Pb(Zr,Ti)O3 thin films on zirconium membranes for micromechanical applications , 1996 .
[4] Nabeel A. Riza,et al. High resolution 50 nm linear displacement macroscale meander-line PZT actuator , 1993 .
[5] Jun Amano,et al. Single-crystal Pb(ZrxTi1−x)O3 thin films prepared by metal-organic chemical vapor deposition: Systematic compositional variation of electronic and optical properties , 1997 .
[6] S. D. Collins,et al. Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids , 1997 .
[7] Toru Fujii,et al. Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope , 1995 .
[8] J. Deschanvres,et al. Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications , 1992 .
[9] Paul Muralt,et al. Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding , 1998 .
[10] Yoshihiro Tomita,et al. Preparation of epitaxial Pb(ZrxTi1−x)O3 thin films and their crystallographic, pyroelectric, and ferroelectric properties , 1989 .
[11] Paul Muralt,et al. Piezoelectric thin films for MEMS , 1997, Applied Physics Letters.
[12] Paul Muralt,et al. Fabrication and characterization of PZT thin-film vibrators for micromotors , 1995 .
[13] G. Dormans,et al. Measurement of piezoelectric coefficients of ferroelectric thin films , 1994 .