论文信息 - An uncooled optically readable infrared focal plane array

An uncooled optically readable infrared focal plane array

This paper reports a new uncooled optically readable infrared focal plane array (UOR-IRFPA), which is fabricated on a glass substrate. Compared with conventional UOR-IRFPA fabricated on a silicon substrate, visible light (readout light) can irradiate on visible reflecting layer through glass substrate and infrared light can directly radiate on infrared absorption layer from another direction. Therefore, the new UOR-IRFPA has near 100% infrared absorption efficiency without removing silicon substrate underneath UOR-IRFPA pixels by using expensive DRIE (deep reactive ion etching). UOR-IRFPA is successfully fabricated based on MEMS (micro-electro-mechanical system) process. Infrared image of human body is obtained by using fabricated UOR-IRFPA.

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