论文信息 - Influence of the Native Oxide Layer on the Silicon Surface During Initial Stages of Nitridation - 字舞流文

Influence of the Native Oxide Layer on the Silicon Surface During Initial Stages of Nitridation

A. Markwitz | W. Trompetter | I. Brown | G. White

[1] A. Kuper,et al. Semiconductor Junctions and Devices , 1966 .

[2] F. Habraken. LPCVD Silicon Nitride and Oxynitride Films , 1991 .