Monolithic piezoelectric push-pull actuators for inertial drives

In many miniature systems for positioning and especially in microrobotics the assembly of the components becomes difficult. At sizes of systems of a few cm/sup 2/ not only the assembly becomes more difficult, downscaling also means that single parts become more fragile and individually more difficult to fabricate. We propose a method which allows to integrate several piezoelectric actuators of one or two degrees of freedom within the same bulk material, permitting to fabricate tiny positioning systems and microrobots at a mesoscopic scale. The principle of the actuator is presented, followed by some remarks on dimensioning and fabrication. Finally, some application examples are given.

[1]  Urban Simu,et al.  Evaluation of a monolithic piezoelectric drive unit for a miniature robot , 2002 .

[2]  L.-A. Liew,et al.  Development of SiCN ceramic thermal actuators , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[3]  Jean-Marc Breguet.  Actionneurs "stick and slip" pour micro-manipulateurs , 1998 .

[4]  T. Higuchi,et al.  Micro impact drive mechanisms using optically excited thermal expansion , 1997 .

[5]  E. Rabinowicz.  Stick and Slip , 1956 .

[6]  T. Higuchi,et al.  A micro ultrasonic motor fabricated by hydrothermal method (1.4 mm in diameter and 5 mm in length stator transducer) , 1998, 1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102).

[7]  Yves Bellouard,et al.  Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices , 1999 .

[8]  Nobuyuki Moronuki.  Linear Motion Microsystem Fabricated on a Silicon Wafer , 1999 .

[9]  Ricardo Pérez Suárez.  Analysis of monolithic piezoceramic structures for micro and nano-positioning , 2003 .

[10]  N. Setter,et al.  New high performance-low cost monolithic bimorph piezoelectric actuators for applications requiring large displacements with significant forces , 2000, ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076).

[11]  Jean-Marc Breguet,et al.  Stick and slip actuators: design, control, performances and applications , 1998, MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388).

[12]  Xuemei Sun,et al.  Analysis and control of monolithic piezoelectric nano-actuator , 2001, IEEE Trans. Control. Syst. Technol..

[13]  N. Setter,et al.  Piezoelectric materials in devices , 2002 .