A parametric study of the deposition of the TiN thin films by laser reactive ablation of titanium targets in nitrogen: the roles of the total gas pressure and the contaminations with oxides
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N. Chitica | I. Mihailescu | A. Luches | V. Teodorescu | E. Gyorgy | A. Perrone | M. Martino | J. Neamțu | G. Mavin | I. Mihăilescu