论文信息 - Nitrogen self-diffusion in magnetron sputtered Si-C-N films - 字舞流文

Nitrogen self-diffusion in magnetron sputtered Si-C-N films

M. Bruns | E. Hüger | H. Schmidt | J. Stahn | U. Geckle | A. Markwitz | T. Geue | D. Lott | U. Tietze