Device-Level Multidimensional Thermal Dynamics With Implications for Current and Future Wide Bandgap Electronics

Researchers have been extensively studying wide-bandgap (WBG) semiconductor materials such as gallium nitride (GaN) with an aim to accomplish an improvement in size, weight, and power of power electronics beyond current devices based on silicon (Si). However, the increased operating power densities and reduced areal footprints of WBG device technologies result in significant levels of self-heating that can ultimately restrict device operation through performance degradation, reliability issues, and failure. Typically, self-heating in WBG devices is studied using a single measurement technique while operating the device under steady-state direct current measurement conditions. However, for switching applications, this steady-state thermal characterization may lose significance since the high power dissipation occurs during fast transient switching events. Therefore, it can be useful to probe the WBG devices under transient measurement conditions in order to better understand the thermal dynamics of these systems in practical applications. In this work, the transient thermal dynamics of an AlGaN/GaN high electron mobility transistor (HEMT) were studied using thermoreflectance thermal imaging and Raman thermometry. Also, the proper use of iterative pulsed measurement schemes such as thermoreflectance thermal imaging to determine the steady-state operating temperature of devices is discussed. These studies are followed with subsequent transient thermal characterization to accurately probe the self-heating from steady-state down to submicrosecond pulse conditions using both thermoreflectance thermal imaging and Raman thermometry with temporal resolutions down to 15 ns.

[1]  G. Jessen,et al.  Sub-Micron Gallium Oxide Radio Frequency Field-Effect Transistors , 2018, 2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP).

[2]  G. Pavlidis,et al.  Improving the Transient Thermal Characterization of GaN HEMTs , 2018, 2018 17th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm).

[3]  G. Pavlidis,et al.  Transient Thermal Characterization of AlGaN/GaN HEMTs Under Pulsed Biasing , 2018, IEEE Transactions on Electron Devices.

[4]  R. Dupuis,et al.  Thermal characterization of gallium nitride p-i-n diodes , 2018 .

[5]  H. Kim,et al.  Integrated temperature mapping of lateral gallium nitride electronics , 2017, Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems.

[6]  Zbigniew Galazka,et al.  $\beta$ -Ga2O3 MOSFETs for Radio Frequency Operation , 2017, IEEE Electron Device Letters.

[7]  Alex Lidow,et al.  GaN-on-Si Power Technology: Devices and Applications , 2017, IEEE Transactions on Electron Devices.

[8]  Ali Shakouri,et al.  Thermal analysis of advanced microelectronic devices using thermoreflectance thermography , 2016, 2016 22nd International Workshop on Thermal Investigations of ICs and Systems (THERMINIC).

[9]  A. Shakouri,et al.  Thermal imaging based on Thermoreflectance addresses the challenges for thermal analysis of today's advanced complex devices , 2016, 2016 17th International Conference on Electronic Packaging Technology (ICEPT).

[10]  A. Allerman,et al.  An AlN/Al0.85Ga0.15N high electron mobility transistor , 2016 .

[11]  R. D. Briggs,et al.  Thermal Design and Characterization of Heterogeneously Integrated InGaP/GaAs HBTs , 2016, IEEE Transactions on Components, Packaging and Manufacturing Technology.

[12]  Stephen B. Bayne,et al.  GaN Technology for Power Electronic Applications: A Review , 2016, Journal of Electronic Materials.

[13]  Akito Kuramata,et al.  Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V , 2016, IEEE Electron Device Letters.

[14]  Benoit Lambert,et al.  Operating channel temperature in GaN HEMTs: DC versus RF accelerated life testing , 2015, Microelectron. Reliab..

[15]  A. Shakouri,et al.  Thermal imaging characterization for high frequency and high power devices , 2015, 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IAAC).

[16]  J. Komiak GaN HEMT: Dominant Force in High-Frequency Solid-State Power Amplifiers , 2015, IEEE Microwave Magazine.

[17]  A. Shakouri,et al.  High Resolution Thermal Characterization and Simulation of Power AlGaN/GaN HEMTs Using Micro-Raman Thermography and 800 Picosecond Transient Thermoreflectance Imaging , 2014, 2014 IEEE Compound Semiconductor Integrated Circuit Symposium (CSICS).

[18]  Radoslava Mitova,et al.  Investigations of 600-V GaN HEMT and GaN Diode for Power Converter Applications , 2014, IEEE Transactions on Power Electronics.

[19]  Philippe Godignon,et al.  A Survey of Wide Bandgap Power Semiconductor Devices , 2014, IEEE Transactions on Power Electronics.

[20]  Fred C. Lee,et al.  Analytical loss model of high voltage GaN HEMT in cascode configuration , 2014, 2013 IEEE Energy Conversion Congress and Exposition.

[21]  Kenneth E. Goodson,et al.  Cooling Limits for GaN HEMT Technology , 2013, 2013 IEEE Compound Semiconductor Integrated Circuit Symposium (CSICS).

[22]  Samuel Graham,et al.  The impact of mechanical stress on the degradation of AlGaN/GaN high electron mobility transistors , 2013 .

[23]  Jin Wei,et al.  Electric Field Distribution Around Drain-Side Gate Edge in AlGaN/GaN HEMTs: Analytical Approach , 2013, IEEE Transactions on Electron Devices.

[24]  D. Ueda,et al.  GaN on Si Technologies for Power Switching Devices , 2013, IEEE Transactions on Electron Devices.

[25]  Eric R. Heller,et al.  Electrical and structural dependence of operating temperature of AlGaN/GaN HEMTs , 2013, Microelectron. Reliab..

[26]  R. Vetury,et al.  Thermometry of AlGaN/GaN HEMTs Using Multispectral Raman Features , 2013, IEEE Transactions on Electron Devices.

[27]  A. Nakajima,et al.  GaN Power Transistor Modeling for High-Speed Converter Circuit Design , 2013, IEEE Transactions on Electron Devices.

[28]  A. Shakouri,et al.  Thermoreflectance CCD imaging of self heating in AlGaN/GaN high electron mobility power transistors at high drain voltage , 2012, 2012 28th Annual IEEE Semiconductor Thermal Measurement and Management Symposium (SEMI-THERM).

[29]  Wei Lu,et al.  The Study of Self-Heating and Hot-Electron Effects for AlGaN/GaN Double-Channel HEMTs , 2012, IEEE Transactions on Electron Devices.

[30]  R. S. Pengelly,et al.  A Review of GaN on SiC High Electron-Mobility Power Transistors and MMICs , 2012, IEEE Transactions on Microwave Theory and Techniques.

[31]  Guanxiong Liu,et al.  Graphene quilts for thermal management of high-power GaN transistors , 2012, Nature Communications.

[32]  Chengxin Wang,et al.  Influence of the growth temperature of AlN buffer on the quality and stress of GaN films grown on 6H–SiC substrate by MOVPE , 2010 .

[33]  N. Killat,et al.  Temperature assessment of AlGaN/GaN HEMTs: A comparative study by Raman, electrical and IR thermography , 2010, 2010 IEEE International Reliability Physics Symposium.

[34]  Neil J Everall,et al.  Confocal Raman Microscopy: Performance, Pitfalls, and Best Practice , 2009, Applied spectroscopy.

[35]  Jungwoo Joh,et al.  GaN HEMT reliability , 2009, Microelectron. Reliab..

[36]  E. Heller,et al.  Simulation of Life Testing Procedures for Estimating Long-Term Degradation and Lifetime of AlGaN/GaN HEMTs , 2008, IEEE Transactions on Electron Devices.

[37]  S. Heikman,et al.  A 97.8% Efficient GaN HEMT Boost Converter With 300-W Output Power at 1 MHz , 2008, IEEE Electron Device Letters.

[38]  T. Beechem,et al.  Micro-Raman thermometry in the presence of complex stresses in GaN devices , 2008 .

[39]  M. Kuball,et al.  Nanosecond Timescale Thermal Dynamics of AlGaN/GaN Electronic Devices , 2008, IEEE Electron Device Letters.

[40]  P. D. Yoder,et al.  Electrothermal analysis of AlGaN/GaN high electron mobility transistors , 2008 .

[41]  Umesh K. Mishra,et al.  GaN-Based RF Power Devices and Amplifiers , 2008, Proceedings of the IEEE.

[42]  S. Sano,et al.  A kW-class AlGaN/GaN HEMT pallet amplifier for S-band high power application , 2007, 2007 European Microwave Integrated Circuit Conference.

[43]  I. Omura,et al.  Gallium Nitride power HEMT for high switching frequency power electronics , 2007, 2007 International Workshop on Physics of Semiconductor Devices.

[44]  O. Ambacher,et al.  Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications , 2007 .

[45]  David G. Cahill,et al.  Frequency dependence of the thermal conductivity of semiconductor alloys , 2007 .

[46]  E. Ozbay,et al.  Scattering analysis of 2DEG carrier extracted by QMSA in undoped Al0.25Ga0.75N/GaN heterostructures , 2007 .

[47]  B. Lassen,et al.  Electron transport through nanosystems driven by Coulomb scattering , 2007, cond-mat/0703286.

[48]  M. Kuball,et al.  Time-Resolved Temperature Measurement of AlGaN/GaN Electronic Devices Using Micro-Raman Spectroscopy , 2007, IEEE Electron Device Letters.

[49]  Hangfeng Ji,et al.  Integrated micro-Raman/infrared thermography probe for monitoring of self-heating in AlGaN/GaN transistor structures , 2006, IEEE Transactions on Electron Devices.

[50]  S. Keller,et al.  High-power AlGaN/GaN HEMTs for Ka-band applications , 2005, IEEE Electron Device Letters.

[51]  Alexander A. Balandin,et al.  Thermal conduction in AlxGa1−xN alloys and thin films , 2005 .

[52]  M. Shur,et al.  GaN-based materials and devices : growth, fabrication, characterization and performance , 2004 .

[53]  B. Ozpineci Comparison of Wide-Bandgap Semiconductors for Power Electronics Applications , 2004 .

[54]  David R. Clarke,et al.  Large area GaN HEMT power devices for power electronic applications: switching and temperature characteristics , 2003, IEEE 34th Annual Conference on Power Electronics Specialist, 2003. PESC '03..

[55]  M. Kuball,et al.  Measurement of temperature in active high-power AlGaN/GaN HFETs using Raman spectroscopy , 2002, IEEE Electron Device Letters.

[56]  Lester F. Eastman,et al.  Two-dimensional electron gases induced by spontaneous and piezoelectric polarization charges in N- and Ga-face AlGaN/GaN heterostructures , 1999 .

[57]  Kenneth E. Goodson,et al.  Short-time-scale thermal mapping of microdevices using a scanning thermoreflectance technique , 1998 .

[58]  Robert J. Trew,et al.  High power applications for GaN-based devices , 1997 .

[59]  A. Allerman,et al.  Al0.85Ga0.15N/Al0.70Ga0.30N High Electron Mobility Transistors with Schottky Gates and Large On/Off Current Ratio over Temperature , 2017 .

[60]  A. Allerman,et al.  High Temperature Operation of Al0.45Ga0.55N/Al0.30Ga0.70N High Electron Mobility Transistors , 2017 .

[61]  Sukwon Choi,et al.  The Impact of Bias Conditions on Self-Heating in AlGaN/GaN HEMTs , 2013, IEEE Transactions on Electron Devices.

[62]  A. Crespo,et al.  Electro-thermal modeling of multifinger AlGaN/GaN HEMT device operation including thermal substrate effects , 2008, Microelectron. Reliab..

[63]  M. Shur,et al.  Properties of advanced semiconductor materials : GaN, AlN, InN, BN, SiC, SiGe , 2001 .