Active Damping Control in MEMS Using Parametric Pumping

This paper investigates the degree of damping control provided by parametrically pumping a harmonically forced microresonator. It is shown that the parametric excitation terms result in reduced damping levels and thus increases the Q-factor of the mode of vibration to which it is applied. The increased Q-factor of the parametrically enhanced resonator permits reduced forcing levels and thus may provide a suitable method for minimising electrical feedthrough and improving sensor performance.