SOI CMOS Technology

Silicon-on-Insulator substrates are being used for many applications such as micro electro-mechanical systems (MEMSX[1] integrated optics [2,3,4] and sensors [5,6] but the most important consumer of SOI wafers is the CMOS integrated circuit industry. This chapter will compare CMOS processing on bulk silicon and on SOI wafers. Processing of fully and partially depleted devices will be discussed. SOI wafers contain only silicon and silicon dioxide, and their appearance is very similar to that of bulk silicon wafers. As a consequence, SOI circuit processing can be carried out in standard bulk silicon processing lines.

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