Analysis of fluidic and mechanical motion in MEMS by using high speed X-ray micro-imaging techniques

We describe studies of micro structure and micro motion in several microsystems using unique high speed X-ray imaging techniques. By way of illustration, we have imaged and measured steady state flow in micro pipes of various shapes and sizes using a high frame rate CCD camera. These experimental results were compared with macroscopic flow models. Also, new X-ray stroboscopic techniques have been developed which allow us to image periodic motion up to kHz rates. To demonstrate this new capability, we studied the dynamic response of a micro electromagnetic optical switch. Finally, we have applied X-ray microtomography in an investigation of the internal micro structure of inkjet print heads.