论文信息 - Evolution of strain and mechanical properties upon annealing in He-implanted 6H-SiC - 字舞流文

Evolution of strain and mechanical properties upon annealing in He-implanted 6H-SiC

Y. F. Li | Ying Du | Chi Zhang | P. Song | C. Yao | K. Wei | L. Pang | M. Cui | Z. Wang | Huiping Zhu | B. Li | Jiaqun Wang | Jianfei Sun | Y. B. Zhu | Z. Wang | Jianfei Sun