How to analyse relaxation and leakage currents of dielectric thin films: Simulation of voltage-step and voltage-ramp techniques

Abstract An empirical electrical equivalent circuit for dielectric thin films, based on experimental data, is developed. Current responses to voltage-steps and to voltage-ramps are calculated and compared with experimental data. The simulation allows us to separate current contributions of different physical processes while the experiment only reveals the sum of the currents.

[1]  R. Waser,et al.  Dielectric relaxation of perovskite—type oxide thin films , 1995 .

[2]  R. Waser,et al.  Fast Transient Measurements on Electroceramic Thin Films , 1995 .

[3]  D. Wouters,et al.  Elements of the leakage current of high-ε ferroelectric PZT films , 1995 .

[4]  R. Waser,et al.  Science and technology of electroceramic thin films , 1995 .

[5]  Y. Fukuda,et al.  Current-Voltage Characteristics of Electron-Cyclotron-Resonance Sputter-Deposited SrTiO3 Thin Films , 1994 .

[6]  S. B. Krupanidhi,et al.  Current-voltage characteristics of ultrafine-grained ferroelectric Pb(Zr, Ti)O_3 thin films , 1994 .

[7]  T. Roberts,et al.  Dielectric breakdown in high-ε films for ULSI DRAMs: II. barium-strontium titanate ceramics , 1994 .

[8]  R. Waser,et al.  Grain Boundary Defect Chemistry of Acceptor‐Doped Titanates: Space Charge Layer Width , 1994 .

[9]  A. Kingon,et al.  Characterization of conduction in PZT thin films produced by laser ablation deposition , 1993 .

[10]  S. B. Krupanidhi,et al.  Structural and electrical characteristics of SrTiO 3 thin films for dynamic random access memory applications , 1993 .

[11]  R. Waser,et al.  Theory of conduction and breakdown in perovskite thin films , 1992 .

[12]  T. Honda,et al.  Electric Properties of SrTiO3 Thin Films Prepared by RF Sputtering , 1992 .

[13]  Chenming Hu,et al.  Electrical characteristics of ferroelectric PZT thin films for DRAM applications , 1992 .

[14]  Shintaro Yamamichi,et al.  SrTiO3 Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties , 1991 .

[15]  R. Zuleeg,et al.  Quantitative measurement of space-charge effects in lead zirconate-titanate memories , 1991 .

[16]  C. Hu,et al.  Electrical conduction and breakdown in sol-gel derived PZT thin films , 1990, 28th Annual Proceedings on Reliability Physics Symposium.

[17]  A. Jonscher.  Dielectric relaxation in solids , 1983 .