Detection of CO2 in solution with a Pt-NiO solid-state sensor.

A metal insulator semiconductor field effect transistor (MISFET)-type sensor for the detection of CO(2) dissolved in aqueous solution is presented. This all-solid-state device is based on a Pt-NiO thin film as active sensing material on the top of a gate electrode. The fabrication of the sensor is described and its performance is characterized. In particular the transient characteristics and response curves at different biases V(RS) versus the amount of dissolved CO(2) are presented. The sensor shows a linear response to the logarithm of the concentration of dissolved CO(2) at room temperature.

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