Single Post 웨이퍼 로봇의 기구학 분석 및 동역학 해석

Recently wafer robot with two-link system have been studied in the many semiconductor manufacturing process. In this study, kinematic analysis of forward kinematic and inverse kinematic for single post type wafer robot was analyzed. Also, to analyze joint driving torque, end_effector position and velocity of single post type wafer robot, Recurdyn and matlab simulink was utilized. In order to verification the kinematic formula of single post type wafer robot, maximum revolution range of active joint was calculated.