论文信息 - Thin-film interference effects on the efficiency of a normal-incidence grating in the 100-350-A wavelength region.

Thin-film interference effects on the efficiency of a normal-incidence grating in the 100-350-A wavelength region.

Thin-film interference effects were observed in the normal-incidence efficiency of a 2400-groove/mm replica grating. The efficiency was measured in the 100-350-A wavelength range and had an oscillatory behavior that resulted from the presence of a thin SiO(2) coating. The thicknesses of the SiO(2) and the underlying oxidized aluminum layers were inferred from computer modeling of the zero-order efficiency. The efficiencies in the diffracted orders were calculated with the modified integral approach and accounting for the multilayer coating and the groove profile derived from atomic force microscopy. The calculated and measured efficiencies were in good agreement.

J F Seely | W R Hunter | L I Goray | J C Rife

[1] Leonid I. Goray. Numerical analysis for relief gratings working in the soft x ray and XUV region by the integral equation method , 1994, Optics & Photonics.

[2] W. R. Hunter,et al. Upgrades and recent performance of the grating/crystal monochromator , 1989 .

[3] Leonid I. Goray,et al. Comparison of rigorous methods for x-ray and XUV grating diffraction analysis , 1995, Optics & Photonics.

[4] W. R. Hunter,et al. An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation , 1986 .

[5] B. L. Henke,et al. X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 , 1993 .

[6] M. Nevière,et al. Multilayer coated gratings for x-ray diffraction: differential theory , 1991 .

[7] T W Barbee,et al. On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136-142-A wavelength region and near normal incidence. , 1993, Applied optics.

[8] Daniel Maystre,et al. A new general integral theory for dielectric coated gratings , 1978 .

[9] M. Nevière,et al. Bragg–Fresnel multilayer gratings: electromagnetic theory , 1994 .

[10] W. Hunter,et al. Comparison of the calculated and the measured efficiencies of a normal-incidence grating in the 125-225- A wavelength range. , 1997, Applied optics.

[11] J F Seely,et al. Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-A wavelength region. , 1997, Applied optics.