Three Dimensionally Interconnected Silicon Nanomembranes for Optical Phased Array (OPA) and Optical True Time Delay (TTD) Applications

Abstract : In summary, during this period of MURI program, our team has made significant progress on both optical phased array (OPA) using actively tuned unequally spaced nano-waveguide arrays and optical true time delay (TTD) devices using photonic crystal waveguides where are all made on silicon nanomembranes. Integrated photonic circuit including 1x12 multimode interference (MMI) coupler, 12 waveguide adiabatic tapers, 12 thermal optical phase tuners, 12 delay lines and 12 non-equally spaced optical faced arrays are fully integrated on a silicon nano-membrane. The device is fully-packaged and tested. The problem of far field inside a silicon slab has been formulated. Beam steering over 30 degrees has been experimentally confirm. An ultra-compact polarization splitter has been demonstrated using a Two Mode Interference (TMI) couplers that also has large fabrication tolerance. Polarization splitters are key components for photonic integrated circuits consisting of polarization dependent devices.

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