论文信息 - Evolution of surface roughness of AlN and GaN induced by inductively coupled Cl2/Ar plasma etching - 字舞流文

Evolution of surface roughness of AlN and GaN induced by inductively coupled Cl2/Ar plasma etching

H. Temkin | K. Zhu | V. Kuryatkov | S. Nikishin | M. Holtz | J. Yun | G. Kipshidze | B. Borisov | D. Aurongzeb