A thick-film capacitive differential pressure transducer

The development of a prototype capacitive pressure transducer and electronic interface is described. The device, constructed using thick films printed onto alumina, is designed to operate over the pressure range of 0-30 psi and may be used to measure either gauge or differential pressure. Practical measurements demonstrate high sensitivity and good linearity. A theoretical model of the device has been developed, which shows good correspondence with the measured results.