Two-photon polymerization of cylinder microstructures by femtosecond Bessel beams

In this work, we present an approach to modulate femtosecond laser beams into Bessel beams with a spatial light modulator (SLM) for two-photon polymerization applications. Bessel beams with different parameters are generated and annular optical fields are produced at the focal plane of the objective. Uniform cylinder microstructures are fabricated by a single illumination during a few seconds without stage translation. By modulating the holograms encoded on the SLM, the diameters of the fabricated annular structures can be flexibly controlled in a wide range with no need of changing the optical elements and realignment of the optical path.

[1]  M. Gu,et al.  Creation of diffraction-limited non-Airy multifocal arrays using a spatially shifted vortex beam , 2013 .

[2]  Robert L. Clark,et al.  A versatile diffractive maskless lithography for single-shot and serial microfabrication , 2010, Optics express.

[3]  S. O’Brien,et al.  Refractive femtosecond laser beam shaping for two-photon polymerization , 2007 .

[4]  Jennifer E. Curtis,et al.  Dynamic holographic optical tweezers , 2002 .

[5]  Yanlei Hu,et al.  High-efficiency fabrication of aspheric microlens arrays by holographic femtosecond laser-induced photopolymerization , 2013 .

[6]  Mangirdas Malinauskas,et al.  Fabrication of micro-tube arrays in photopolymer SZ2080 by using three different methods of a direct laser polymerization technique , 2012 .

[7]  Aleksandr Ovsianikov,et al.  Laser photofabrication of cell-containing hydrogel constructs. , 2014, Langmuir : the ACS journal of surfaces and colloids.

[8]  B. J. Metcalf,et al.  Adaptive slit beam shaping for direct laser written waveguides. , 2012, Optics letters.

[9]  K. Lee,et al.  Two‐photon stereolithography for realizing ultraprecise three‐dimensional nano/microdevices , 2009 .

[10]  C. Fotakis,et al.  Ultra-low shrinkage hybrid photosensitive material for two-photon polymerization microfabrication. , 2008, ACS nano.

[11]  Makoto Ishida,et al.  Out-of-plane microtube arrays for drug delivery—liquid flow properties and an application to the nerve block test , 2009, Biomedical microdevices.

[12]  M. Wei,et al.  Adjustable generation of bottle and hollow beams using an axicon , 2005 .

[13]  Rajarshi Roy,et al.  Generation of nondiffracting Bessel beams by use of a spatial light modulator. , 2003, Optics letters.

[14]  Stuart Edwardson,et al.  Ultrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns , 2012 .

[15]  B. Chichkov,et al.  Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator , 2011, Biomedical optics express.

[16]  Oliver G. Schmidt,et al.  Process integration of microtubes for fluidic applications , 2006 .

[17]  Gabriel M. Crean,et al.  Pattern generation using axicon lens beam shaping in two-photon polymerisation , 2007 .

[18]  Xian-Zi Dong,et al.  Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing , 2007 .

[19]  Hong‐Bo Sun,et al.  Multiple-spot parallel processing for laser micronanofabrication , 2005 .

[20]  D M Cottrell,et al.  Intensity and phase measurements of nondiffracting beams generated with a magneto-optic spatial light modulator. , 1996, Applied optics.

[21]  Parallel two-photon photopolymerization of microgear patterns , 2009 .

[22]  Boris N. Chichkov,et al.  Development of functional sub-100 nm structures with 3D two-photon polymerization technique and optical methods for characterization , 2012 .