论文信息 - Rotating dust ring in an RF discharge coupled with a dc-magnetron sputter source. Experiment and simulation - 字舞流文

Rotating dust ring in an RF discharge coupled with a dc-magnetron sputter source. Experiment and simulation

R. Schneider | M. Hannemann | R. Hippler | K. Matyash | M. Fröhlich | H. Kersten | G. Thieme