论文信息 - CMOS compatible cost-efficient fabrication of SOI grating couplers

CMOS compatible cost-efficient fabrication of SOI grating couplers

A CMOS compatible process for the cost-efficient fabrication of SOI grating couplers is presented. Test devices have been fabricated and characterized in a fully automated measurement setup at telecom wavelength (1550nm). Coupling efficiencies of -3.6 and -4.1dB have been achieved for TE and TM polarization, respectively. The 3dB bandwidth has been measured to be about 50nm.

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