Processing optimization of solution derived PbZr1−xTixO3 thin films for piezoelectric applications

Abstract Processing optimization allowed the sol-gel fabrication of 1 μm thick, phase pure perovskite thin films with identical grain size and controlled texture. This made it possible to fabricate stress compensated beams to measure the transverse piezoelectric coefficient over the whole composition range of PbZr1−xTixO3. The highest value of -12.1 C/m2 was measured for (100)/(001) textured PZT53/47. For (111) textured films the maximum value of -8.7 C/m2 was found to be in the tetragonal phase field at 55% Ti.

[1]  Paul Muralt,et al.  Piezoelectric thin films for MEMS , 1997, Applied Physics Letters.

[2]  Nava Setter,et al.  Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substrates , 1994 .

[3]  G. B. Harris.  X. Quantitative measurement of preferred orientation in rolled uranium bars , 1952 .

[4]  William Crane Jun..  XXIV. Observations on the doctrines of definite proportions in chemical affinity , 1814 .

[5]  Paul Muralt,et al.  Fabrication and characterization of PZT thin-film vibrators for micromotors , 1995 .

[6]  Paul Muralt,et al.  Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films , 1999 .

[7]  I. Kanno,et al.  PIEZOELECTRIC PROPERTIES OF C-AXIS ORIENTED PB(ZR,TI)O3 THIN FILMS , 1997 .

[8]  S. D. Collins,et al.  Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids , 1997 .

[9]  R. D. Nasby,et al.  Highly Oriented, Chemically Prepared Pb(Zr, Ti)O3 Thin Films , 1993 .

[10]  Toru Fujii,et al.  Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope , 1995 .

[11]  Paul Muralt,et al.  Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding , 1998 .

[12]  D. Payne,et al.  Lead Oxide Coatings on Sol–Gel‐Derived Lead Lanthanum Zirconium Titanate Thin Layers for Enhanced Crystallization into the Perovskite Structure , 1994 .

[13]  Paul Muralt,et al.  Stabilized Platinum Electrodes for Ferroelectric Film Deposition using Ti, Ta and Zr Adhesion Layers , 1998 .

[14]  J. Speck,et al.  Epitaxial growth of PbTiO_3 thin films on (001) SrTiO_3 from solution precursors , 1995 .

[15]  D. Uhlmann,et al.  Ultrastructure processing of ceramics, glasses, and composites , 1992 .

[16]  M. Dubois.  Measurements of the effective transe piezoelectric coefficient e_ of AlN and Pb(Zr_x,Ti_ )O_3 thin films , 1999 .

[17]  Seshu B. Desu,et al.  Low temperature perovskite formation of lead zirconate titanate thin films by a seeding process , 1993 .

[18]  W. J. Merz.  Piezoelectric Ceramics , 1972, Nature.

[19]  Robert W. Schwartz,et al.  Chemical Solution Deposition of Perovskite Thin Films , 1997 .

[20]  M.-A. Dubois,et al.  PZT thin film actuated elastic fin micromotor , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[21]  B. Jaffe.  CHAPTER 7 – SOLID SOLUTIONS OF Pb(Ti, Zr, Sn, Hf)O3 , 1971 .

[22]  Nabeel A. Riza,et al.  High resolution 50 nm linear displacement macroscale meander-line PZT actuator , 1993 .