论文信息 - A double-sided capacitive miniaturized accelerometer based on photovoltaic etch-stop technique

A double-sided capacitive miniaturized accelerometer based on photovoltaic etch-stop technique

Abstract A double-sided capacitive miniaturized accelerometer is presented. The photovoltaic etch-stop technique (PHET) is used to simplify the device fabrication. PHET being a relatively new technique, the paper emphasizes the design rules required in order to have an etch stop. The device is a uniaxial accelerometer with practically no cross-sensitivity, which can sense accelerations in the range -5g to 5g. The parasitic capacitances and the effects of the electric forces driving the device are cancelled out by its symmetry. The final device measures 2.2 mm × 2.0 mm × 1.5 mm.

Robert Puers | Michel De Cooman | Daniel Lapadatu

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