Dynamic Simulations of a Piezoelectric Driven MEMS Micropump

Abstract Electrical equivalent networks have been used to simulate a piezoelectric driven MEMS micropump dedicated to insulin delivery. The numerical model has been validated using experimental data. The pressure profiles delivered by integrated sensors are intended to be analyzed in a continuous way during the therapy. Any failure like occlusion, valve leakage or air bubble will modify the shape of these profiles. The challenge is here to build a detection algorithm able to trigger the suitable alarm in case of failure. The numerical modeling is dedicated to the test of the detection algorithm reliability in case of multiple failure modes.