NiTi shape memory alloy thin film based microgripper

In this paper, we present a way to fabricate microgripper that could well meet the industry needs, i.e. low cost, high performance etc. A medium sized microgripper of 1.6 mm in length has been fabricated, tested and simulated. This novel design, with its fabrication process, makes it possible for batch production, which results in lower production cost. Its low cost has unique advantages in both medical and manufacturing industries. For example, in the medical field, the microgripper could be disposed after every use, much like a syringe without imposing excessive costs. Our finite element simulation agrees reasonably well with the measured behavior.