Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements

High-speed tactile roughness measurements set high demand on the trackability of the stylus probe. Because of the features of low mass, low probing force, and high signal linearity, the piezoresistive silicon microprobe is a hopeful candidate for high-speed roughness measurements. This paper investigates the trackability of these microprobes through building a theoretical dynamic model, measuring their resonant response, and performing tip-flight experiments on surfaces with sharp variations. Two microprobes are investigated and compared: one with an integrated silicon tip and one with a diamond tip glued to the end of the cantilever. The result indicates that the microprobe with the silicon tip has high trackability for measurements up to traverse speeds of 10 mm/s, while the resonant response of the microprobe with diamond tip needs to be improved for the application in high-speed topography measurements.

[1]  Richard K. Leach,et al.  TOPICAL REVIEW: Bandwidth characteristics and comparisons of surface texture measuring instruments , 2010 .

[2]  Uwe Brand,et al.  Traceable profile and roughness measurements inside micro sonic nozzles with the Profilscanner , 2015 .

[3]  Lutz Doering,et al.  Piezoresistive cantilever as portable micro force calibration standard , 2003 .

[4]  D J Whitehouse.  A Revised Philosophy of Surface Measuring Systems , 1988 .

[5]  A. Briggs,et al.  Atomic force acoustic microscopy , 2013 .

[6]  J. Villarrubia.  Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation , 1997, Journal of research of the National Institute of Standards and Technology.

[7]  Shaju K. Albert,et al.  Effect of the tracing speed and span on roughness parameters determined by stylus type equipment , 2014 .

[8]  T. Stolarski.  Modern Tribology Handbook , 2003 .

[9]  Uwe Brand,et al.  High-speed microprobe for roughness measurements in high-aspect-ratio microstructures , 2017 .

[10]  Uwe Brand,et al.  Development of a traceable profilometer for high-aspect-ratio microstructures metrology , 2014 .

[11]  E. Peiner,et al.  Slender Tactile Sensor for Contour and Roughness Measurements Within Deep and Narrow Holes , 2008, IEEE Sensors Journal.

[12]  Supaporn Jaturunruangsri,et al.  Evaluation of material surface profiling methods: contact versus non-contact , 2015 .

[13]  Ludger Koenders,et al.  Aspects of scanning force microscope probes and their effects on dimensional measurement , 2008 .

[14]  Uwe Brand,et al.  Tactile probes for dimensional metrology with microcomponents at nanometre resolution , 2008 .

[15]  Min Xu,et al.  Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm , 2019, Sensors.

[16]  E. Peiner,et al.  Nondestructive Evaluation of Diesel Spray Holes Using Piezoresistive Sensors , 2013, IEEE Sensors Journal.

[17]  Euan Morrison,et al.  A prototype scanning stylus profilometer for rapid measurement of small surface areas , 1995 .

[18]  E. Bamberg,et al.  Scan speed limit in atomic force microscopy , 1993 .

[19]  Uwe Brand,et al.  Traceable profile and roughness measurements inside small sonic nozzles with the Profilscanner to analyse the influence of inner topography on the flow rate characters , 2016 .

[20]  Euan Morrison,et al.  The development of a prototype high-speed stylus profilometer and its application to rapid 3D surface measurement , 1996 .

[21]  Beth L Pruitt,et al.  High-bandwidth piezoresistive force probes with integrated thermal actuation , 2012, Journal of micromechanics and microengineering : structures, devices, and systems.

[22]  P. Sutowski,et al.  STYLUS PROFILOMETRY IN SURFACE ROUGHNESS MEASUREMENTS OF THE VERTICAL CONICAL MIXING UNIT USED IN A FOOD INDUSTRY , 2018 .