Modal Properties of Long-Wavelength Tunable MEMS-VCSELs With Curved Mirrors: Comparison of Experiment and Modeling

The effective interplay of simulation and experimental results for analysis and optimization of microelectromechanical system (MEMS)-tunable vertical-cavity surface-emitting lasers (VCSELs) operating at wavelength around 1.55 mum is presented. The VCSEL combines a MEMS with concave Al-GaAs-GaAs mirror membrane and an InP-based active cavity with tunnel junction aperture in a hybrid two-chip assembly. Using electrothermal MEMS actuation the included air-gap can be expanded and the cavity resonance can be tuned to longer wavelengths. The experimental results are compared with the theoretical results provided by VELM (VCSEL ELectroMagnetic), the efficient code based on the coupled mode model and adapted for the first time to handle curved-mirror geometries. The vectorial code is found to be able to fully reproduce the experimental results, such as device tuning range, modal frequency splitting, threshold gains and modal selectivity.

[1]  R. Smith,et al.  TUNABLE LASERS , 1969, Annals of the New York Academy of Sciences.

[2]  T. Tanbun-ek,et al.  Optical gain measurements based on fundamental properties and comparison with many-body theory , 1999 .

[3]  R. Baets,et al.  Comparison of optical VCSEL models on the simulation of oxide-confined devices , 2001 .

[4]  Elizabeth Bruce,et al.  Communications: tunable lasers , 2002 .

[5]  P. Tayebati,et al.  Half-symmetric cavity tunable microelectromechanical VCSEL with single spatial mode , 1998, IEEE Photonics Technology Letters.

[6]  L.A. Coldren,et al.  Tunable semiconductor lasers: a tutorial , 2004, Journal of Lightwave Technology.

[7]  C. Chang-Hasnain,et al.  Tunable micromachined vertical cavity surface emitting laser , 1995 .

[8]  J. Harris,et al.  Micromachined widely tunable vertical cavity laser diodes , 1998 .

[9]  P. Meissner,et al.  Singlemode and Polarization Stable MEMS-VCSEL with Broadband Tuning Characteristics around 1.55 µ m , 2006, 2006 European Conference on Optical Communications.

[10]  M. Amann,et al.  Continuously tunable long-wavelength MEMS-VCSEL with over 40-nm tuning range , 2004, IEEE Photonics Technology Letters.

[11]  R. Michalzik,et al.  Optimized integrated surface grating design for polarization-stable VCSELs , 2006, IEEE Journal of Quantum Electronics.

[12]  Pierluigi Debernardi,et al.  Features of vectorial modes in phase-coupled VCSEL arrays: experiments and theory , 2003 .

[13]  M. Amann,et al.  Long-wavelength tunable vertical-cavity surface-emitting lasers and the influence of coupled cavities. , 2005, Optics express.

[14]  Y. Matsui,et al.  Complete polarization mode control of long-wavelength tunable vertical-cavity surface-emitting lasers over 65-nm tuning, up to 14-mW output power , 2003 .

[15]  R. W. Glew,et al.  Logarithmic gain/current-density characteristic of InGaAs/InGaAlAs/InP multi-quantum-well separate-confinement-heterostructure lasers , 1991 .

[16]  Qi Chen,et al.  MEMS-tunable vertical-cavity SOAs , 2005, IEEE Journal of Quantum Electronics.

[17]  R. Michalzik,et al.  Theoretical-Experimental Study of the Vectorial Modal Properties of Polarization-Stable Multimode Grating VCSELs , 2007, IEEE Journal of Selected Topics in Quantum Electronics.

[18]  H. J. Unold,et al.  Single-mode, single-polarization VCSELs via elliptical surface etching: experiments and theory , 2003 .

[19]  Pierluigi Debernardi,et al.  Coupled mode theory: a powerful tool for analyzing complex VCSELs and designing advanced device features , 2003 .

[20]  Pierluigi Debernardi,et al.  Three-dimensional model for vectorial fields in vertical-cavity surface-emitting lasers , 2001 .

[21]  Hubert Halbritter,et al.  Long-wavelength MEMS tunable vertical-cavity surface-emitting lasers with high sidemode suppression , 2006 .

[22]  M. Amann,et al.  MEMS-tunable 1.55-/spl mu/m VCSEL with extended tuning range incorporating a buried tunnel junction , 2006, IEEE Photonics Technology Letters.

[23]  R. Michalzik,et al.  Reliable polarization control of VCSELs through monolithically integrated surface gratings: a comparative theoretical and experimental study , 2005, IEEE Journal of Selected Topics in Quantum Electronics.

[24]  Ingo Fischer,et al.  Influence of anisotropies on transverse modes in oxide-confined VCSELs , 2002 .

[25]  R. Michalzik,et al.  Efficient single-mode oxide-confined GaAs VCSEL's emitting in the 850-nm wavelength regime , 1997, IEEE Photonics Technology Letters.