Design of a High-Accuracy CMM Based on Multi-Lateration Techniques

Abstract To address the industrial requirement for the calibration of two-dimensional and three-dimensional artefacts, NPL is developing a new primary CMM with a target uncertainty of 300 nm ( k = 1.96) within a cubic working volume of side 600 mm. This CMM is based on the principle of multi-lateration whereby spatial coordinates are determined solely from measurements of displacement of a moving probe relative to a number, probably as many as eight, of fixed measuring stations. A prototype measuring station has been designed, built and tested. The design of the measuring station has been optimised to minimise uncertainties due to beam steering. This paper describes the design of the measuring station, presents an evaluated uncertainty and outlines test results obtained from the prototype system.

[1]  Mmpa Marc Vermeulen,et al.  Design for precision : current status and trends , 1998 .

[2]  J.R.R. Mayer,et al.  Quadrilateration and measurement site identification with dual scanning axis laser tracking interferometers , 1997 .

[3]  Hanqi Zhuang,et al.  Modeling Gimbal Axis Misalignments and Mirror Center Offset in a Single-Beam Laser Tracking Measurement System , 1995, Int. J. Robotics Res..

[4]  Allen H. Greenleaf Self-Calibrating Surface Measuring Machine , 1983 .

[5]  K. Lau,et al.  Automatic laser tracking interferometer system for robot metrology , 1986 .

[6]  Mark Egdall,et al.  Large Surface Measuring Machine , 1983, Other Conferences.

[7]  M. Goto,et al.  Four-beam laser interferometry for three-dimensional microscopic coordinate measurement. , 1994, Applied optics.

[8]  Raimund Loser,et al.  Improved reflector for interferometric tracking in three dimensions , 1995 .

[9]  Markus Vincze,et al.  Real-time contactless measurement of robot pose in six degrees of freedom , 1995 .

[10]  K. Uehara,et al.  Development of a Coordinate Measuring System with Tracking Laser Interferometers , 1991 .

[11]  Sonko Osawa,et al.  DESIGN NOTE: Whole-viewing-angle cat's-eye retroreflector as a target of laser trackers , 1999 .

[12]  J. B. Bryan,et al.  Design of a new error-corrected co-ordinate measuring machine , 1979 .

[13]  R. R. Donaldson,et al.  Design And Construction Of A Large, Vertical Axis Diamond Turning Machine , 1983, Optics & Photonics.

[14]  R. D. Day,et al.  Spherical shape measurements using subaperture optical testing techniques , 1989 .