Graphitization of Tetrahedral Amorphous Carbon Films Induced by Core Electron Excitations

We studied effects of soft X-ray illumination on tetrahedral amorphous carbon (ta-C) films by in situ measuring spectra of X-ray absorption and resonant Auger electron emission. Illumination with 285 ±3.5 eV photons, resonant mainly with the π* peak associated with graphitic structures and partly with the tentatively assigned σ* core exciton peak, induced a change in the surface-sensitive absorption and Auger spectra which is interpreted as an increase of graphitic phase, similar to but slightly different from the structural conversion from sp3 to sp2 bonding that is induced by 200 keV electron beam irradiation previously found by the authors.