论文信息 - Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck - 字舞流文

Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck

K. Devriendt | K. Sankaran | G. Pourtois | C. Adelmann | K. Croes | N. Jourdan | N. Heylen | F. Lazzarino | H. Zahedmanesh | M. Ercken | Z. Tokei | M. Na | R. Baert | I. Ciofi | K. Vanstreels | H. Struyf | L. Teugels | J. Sweerts | Q. Le | P. Morin | S. Elshocht | G. Murdoch | J. Versluijs | J. Boemmels | M. O'Toole | S. Paolillo | F. Holsteyns | E. Kesters | C. Wilson | A. Gupta | S. Decoster | V. Blanco | M. V. Veen | J. Soulie | V. Vega | S. Park | M. Mao