Study on MRF Machining Method of Periodic Structure

For the characteristics of polishing parameters directly influencing periodic structure machining precision, the key problems of magnetorheological finishing (MRF) on periodic structure are analyzed, and a machining mode based on polishing parameters controls is established. On the basis of study overall processing route of periodic structure MRF, the optimal matching scheme of polishing parameters is studied and processing method is optimized by orthogonal experiment. And a simulation study on the method is done. Experiment results shows that rms of surface error could converge to 0.047? (?=632.8nm) when machining a continuous phase plate (CPP) with minimum 9mm space period. It verifies the correctness of the method.