论文信息 - Abnormal gate oxide thickening at active edge with SiN-linered shallow trench isolation - 字舞流文

Abnormal gate oxide thickening at active edge with SiN-linered shallow trench isolation

S. Nam | Kong-Soo Lee | Ki-Hyun Hwang | Hyeon-deok Lee | C. Song | Jae-Jong Ban | Seungwook Shin