Harsh military environments and microelectromechanical (MEMS) devices

The harsh military environment including operational requirements (temperature, pressure, acceleration and vibration) is described for a few munition applications. A summary of ground based experimentation pertaining to MEMS devices is presented. Results of a high-g shock study suggest that some Microelectromechanical (MEMS) sensors are rugged enough to survive both low-g and high-g launch. Small sensitivities to temperature, shock and vibration are described for a MEMS angular rate sensor. Flight experiments with artillery and rockets instrumented with MEMS angular rate sensors, accelerometers, and telemetry units, were recently completed. Analysis of the angular rate sensor data show encouraging results for surviving and measuring munition pitching and yawing behavior. There is mention of future military applications for MEMS and needed requirements to enable a successful transition.