Modified Nodal Analysis for MEMS with Multi-Energy Domains

A modified nodal analysis approach for the design, simulation, and display of three-dimensional microelectromechanical systems with coupled energy domains is presented. Static, steady-state, and transient algorithms are introduced followed by examples. Transient and static analysis in noninertial frames is now supported. Simulated results include (1) three-dimensional modal analysis of a torsional micro-mirror, (2) static analysis of a gap-closing actuator with coupled circuit, mechanical, and electrostatic energy domains, (3) the induced current response of a comb-driven multi-mode resonator, and (4) the transient response of a gap-closing actuator due to a time varying voltage showing a nonlinearly varying resonance frequency and displacement.