65-, 45-, and 32-nm Aluminium and Copper Transmission-Line Model at Millimeter-Wave Frequencies

An improved analytical model of the CMOS 65-, 45-, and 32-nm silicon technology integrated transmission line is proposed. This model is derived from previous classical ones used for printed circuits board lines. Improvements have been performed to take into account the size of integrated lines. The study is validated up to millimeter-wave frequencies for different linewidths realized with various metal levels. Accurate results allow the model to be implemented in commercial computer-aided design software commonly used for millimeter-wave designs. A comparison with commercial tools is carried out.

[1]  L. Hayden,et al.  An enhanced Line-Reflect-Reflect-Match calibration , 2006, 2006 67th ARFTG Conference.

[2]  M. V. Schneider,et al.  Microstrip dispersion , 1972 .

[3]  Hermann Schumacher,et al.  Transmission lines and passive elements for multilayer coplanar circuits on silicon , 1998 .

[4]  Duane S. Boning,et al.  PATTERN AND PROCESS DEPENDENCIES IN COPPER DAMASCENE CHEMICAL MECHANICAL POLISHING PROCESSES , 1998 .

[5]  A. Weisshaar,et al.  CAD-oriented equivalent-circuit modeling of on-chip interconnects on lossy silicon substrate , 2000 .

[6]  Tadao Nagatsuma,et al.  A New Fabrication Process for Low-Loss Millimeter-Wave Transmission Lines on Silicon , 1999 .

[7]  Raj Mittra,et al.  Combining FDTD simulations with measurements of microstrip ring resonators for characterization of low‐ and high‐K dielectrics at microwaves , 2001 .

[8]  E. Hammerstad,et al.  Accurate Models for Microstrip Computer-Aided Design , 1980, 1980 IEEE MTT-S International Microwave symposium Digest.

[9]  A. Safwat,et al.  Sensitivity Analysis of Calibration Standards for SOLT and LRRM , 2001, 58th ARFTG Conference Digest.

[10]  Dylan F. Williams,et al.  LRM probe-tip calibrations using nonideal standards , 1995 .

[11]  Francesc Purroy,et al.  New theoretical analysis of the LRRM calibration technique for vector network analyzers , 2001, IEEE Trans. Instrum. Meas..

[12]  Keith Jones,et al.  LRM and LRRM Calibrations with Automatic Determination of Load Inductance , 1990, 36th ARFTG Conference Digest.

[13]  A. Mangan,et al.  De-embedding transmission line measurements for accurate modeling of IC designs , 2006, IEEE Transactions on Electron Devices.

[14]  W. Heinrich,et al.  Model of thin-film microstrip line for circuit design , 2001 .

[15]  Tadao Nagatsuma,et al.  A New Fabrication Process for Low-Loss Millimeter-Wave Transmission Lines on Silicon , 2000 .

[16]  Dr.K.Sri Rama Krishna,et al.  ANN Models for Microstrip Line Synthesis and Analysis , 2008 .

[17]  L.F. Tiemeijer,et al.  Low-Loss Patterned Ground Shield Interconnect Transmission Lines in Advanced IC Processes , 2007, IEEE Transactions on Microwave Theory and Techniques.

[18]  Andrew B. Kahng,et al.  Filling algorithms and analyses for layout density control , 1999, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[19]  J.L. Narayana,et al.  ANN models for coplanar strip line analysis and synthesis , 2008, 2008 International Conference on Recent Advances in Microwave Theory and Applications.

[20]  M. V. Schneider,et al.  Microstrip lines for microwave integrated circuits , 1969 .

[21]  H. A. Wheeler.  Transmission-Line Properties of Parallel Strips Separated by a Dielectric Sheet , 1965 .

[22]  D. Pasquet,et al.  CAD-Oriented Model of a Coplanar Line on a Silicon Substrate Including Eddy-Current Effects and Skin Effect , 2008, IEEE Transactions on Microwave Theory and Techniques.