Silicon photonic resonator sensors and devices

Silicon photonic resonators, implemented using silicon-on-insulator substrates, are promising for numerous applications. The most commonly studied resonators are ring/racetrack resonators. We have fabricated these and other resonators including disk resonators, waveguide-grating resonators, ring resonator reflectors, contra-directional grating-coupler ring resonators, and racetrack-based multiplexer/demultiplexers. While numerous resonators have been demonstrated for sensing purposes, it remains unclear as to which structures provide the highest sensitivity and best limit of detection; for example, disc resonators and slot-waveguide-based ring resonators have been conjectured to provide an improved limit of detection. Here, we compare various resonators in terms of sensor metrics for label-free bio-sensing in a micro-fluidic environment. We have integrated resonator arrays with PDMS micro-fluidics for real-time detection of biomolecules in experiments such as antigen-antibody binding reaction experiments using Human Factor IX proteins. Numerous resonators are fabricated on the same wafer and experimentally compared. We identify that, while evanescent-field sensors all operate on the principle that the analyte's refractive index shifts the resonant frequency, there are important differences between implementations that lie in the relationship between the optical field overlap with the analyte and the relative contributions of the various loss mechanisms. The chips were fabricated in the context of the CMC-UBC Silicon Nanophotonics Fabrication course and workshop. This yearlong, design-based, graduate training program is offered to students from across Canada and, over the last four years, has attracted participants from nearly every Canadian university involved in photonics research. The course takes students through a full design cycle of a photonic circuit, including theory, modelling, design, and experimentation.

[1]  T. Baehr‐Jones,et al.  Analysis of the tuning sensitivity of silicon-on-insulator optical ring resonators , 2005, Journal of Lightwave Technology.

[2]  Matthew S. Luchansky,et al.  Silicon photonic microring resonators for quantitative cytokine detection and T-cell secretion analysis. , 2010, Analytical chemistry.

[3]  L. Chrostowski,et al.  Defect-mediated resonance shift of silicon-on-insulator racetrack resonators. , 2011, Optics express.

[4]  A. Delage,et al.  Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding. , 2008, Optics Express.

[5]  Tomoyuki Yoshie,et al.  Optical Microcavity: Sensing down to Single Molecules and Atoms , 2011, Sensors.

[6]  Pierre Benech,et al.  Ultra-compact microdisk resonator filters on SOI substrate. , 2006, Optics express.

[7]  Vittorio M. N. Passaro,et al.  Guided-Wave Optical Biosensors , 2007, Sensors (Basel, Switzerland).

[8]  P. Schellhammer,et al.  Serum protein fingerprinting coupled with a pattern-matching algorithm distinguishes prostate cancer from benign prostate hyperplasia and healthy men. , 2002, Cancer research.

[9]  Alireza Kargar,et al.  Bending Efficiency of Bent Multiple-Slot Waveguides , 2009 .

[10]  W. Lukosz,et al.  Principles and sensitivities of integrated optical and surface plasmon sensors for direct affinity sensing and immunosensing , 1991 .

[11]  Lukas Chrostowski,et al.  Temperature Effects on Silicon-on-Insulator (SOI) Racetrack Resonators: A Coupled Analytic and 2-D Finite Difference Approach , 2010, Journal of Lightwave Technology.

[12]  Amadeu Griol,et al.  Slot-waveguide biochemical sensor. , 2007, Optics letters.

[13]  A. Ksendzov,et al.  Integrated optics ring-resonator sensors for protein detection. , 2005, Optics letters.

[14]  Kevin L. Lear,et al.  Immunoassay demonstration using a local evanescent array coupled biosensor , 2010, BiOS.

[15]  G. Stemme,et al.  A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips. , 2010, Lab on a chip.

[16]  B. Lamontagne,et al.  A Silicon-on-Insulator Photonic Wire Based Evanescent Field Sensor , 2006, IEEE Photonics Technology Letters.

[17]  Jean-Marc Fédéli,et al.  Real-time cancellation of temperature induced resonance shifts in SOI wire waveguide ring resonator label-free biosensor arrays. , 2010, Optics express.

[18]  Rajan P Kulkarni,et al.  Label-Free, Single-Molecule Detection with Optical Microcavities , 2007, Science.

[19]  P. Bienstman,et al.  Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator , 2009, IEEE Photonics Journal.

[20]  Amadeu Griol,et al.  Label-free optical biosensing with slot-waveguides. , 2008, Optics letters.

[21]  Siva Yegnanarayanan,et al.  Toward ultimate miniaturization of high Q silicon traveling-wave microresonators. , 2010, Optics express.

[22]  Xudong Fan,et al.  On the performance quantification of resonant refractive index sensors. , 2008, Optics express.

[23]  Michael Hochberg,et al.  High-Q Optical Resonators in Silicon-on-Insulator-Based Slot Waveguides , 2005 .

[24]  L. Chrostowski,et al.  Narrow-band transmission filter using phase-shifted Bragg gratings in SOI waveguide , 2011, IEEE Photonic Society 24th Annual Meeting.

[25]  D. Markov,et al.  Breaking the 10(-7) barrier for RI measurements in nanoliter volumes. , 2002, Analytical chemistry.

[26]  Yuze Sun,et al.  Sensitive optical biosensors for unlabeled targets: a review. , 2008, Analytica chimica acta.

[27]  D. Erickson,et al.  Nanoscale optofluidic sensor arrays. , 2008, Optics express.

[28]  Samantha M. Grist,et al.  Cascaded silicon-on-insulator microring resonators for the detection of biomolecules in PDMS microfluidic channels , 2011, MOEMS-MEMS.

[30]  Christelle Monat,et al.  Integrated optofluidics: A new river of light , 2007 .

[31]  G. Whitesides,et al.  Soft Lithography. , 1998, Angewandte Chemie.

[32]  D. Batens,et al.  Theory and Experiment , 1988 .

[33]  O. Wolfbeis,et al.  Optical sensors: industrial environmental and diagnostic applications , 2004 .

[34]  Michael Hochberg,et al.  Multiplexed inkjet functionalization of silicon photonic biosensors. , 2011, Lab on a chip.

[35]  Michael Hochberg,et al.  Towards fabless silicon photonics , 2010 .

[36]  Adam L. Washburn,et al.  Quantitative, label-free detection of five protein biomarkers using multiplexed arrays of silicon photonic microring resonators. , 2010, Analytical chemistry.

[37]  O. Painter,et al.  Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment. , 2005, Optics express.

[38]  Y. Vlasov,et al.  Losses in single-mode silicon-on-insulator strip waveguides and bends. , 2004, Optics express.

[39]  S. Quake,et al.  Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.

[40]  Francesco Dell'Olio,et al.  Optical sensing by optimized silicon slot waveguides. , 2007, Optics express.

[41]  Muzammil Iqbal,et al.  A robust silicon photonic platform for multiparameter biological analysis , 2009, OPTO.

[42]  L. C. Gunn,et al.  Label-free quantitation of a cancer biomarker in complex media using silicon photonic microring resonators. , 2009, Analytical chemistry.

[43]  Göran Stemme,et al.  On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array. , 2010, Optics express.

[44]  Ian M. White,et al.  An opto-fluidic ring resonator biosensor for the detection of organophosphorus pesticides , 2008 .

[45]  L. Kou,et al.  Refractive indices of water and ice in the 0.65- to 2.5-µm spectral range. , 1993, Applied optics.

[46]  Jiří Homola,et al.  Surface plasmon resonance sensors based on diffraction gratings and prism couplers: sensitivity comparison , 1999 .

[47]  Wei Shi,et al.  Design and characterization of microring reflectors with a waveguide crossing. , 2010, Optics letters.

[48]  V. M. Murukeshan,et al.  Compact SOI nanowire refractive index sensor using phase shifted Bragg grating. , 2009, Optics express.

[49]  R. Baets,et al.  Silicon-on-Insulator microring resonator for sensitive and label-free biosensing. , 2007, Optics express.

[50]  Gun Yong Sung,et al.  Design and Fabrication of Tb $^{3+}$-Doped Silicon Oxy-Nitride Microdisk for Biosensor Applications , 2011, IEEE Photonics Technology Letters.

[51]  J E Heebner,et al.  Sensitive disk resonator photonic biosensor. , 2001, Applied optics.

[52]  Vittorio M. N. Passaro,et al.  Efficient Chemical Sensing by Coupled Slot SOI Waveguides , 2009, Sensors.

[53]  D Van Thourhout,et al.  Silicon-on-Insulator Microring Resonator Sensor Integrated on an Optical Fiber Facet , 2011, IEEE Photonics Technology Letters.

[54]  S. Chu,et al.  A universal biosensing platform based on optical micro-ring resonators. , 2008, Biosensors & bioelectronics.

[55]  Abraham J. Qavi,et al.  Multiplexed detection and label-free quantitation of microRNAs using arrays of silicon photonic microring resonators. , 2010, Angewandte Chemie.

[56]  Muzammil Iqbal,et al.  Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation , 2010, IEEE Journal of Selected Topics in Quantum Electronics.