论文信息 - A gigahertz silicon-on-insulator Mach-Zehnder modulator

A gigahertz silicon-on-insulator Mach-Zehnder modulator

We report a modulator in which a polysilicon-oxide-silicon capacitor forms a ridge waveguide to achieve unprecedented performance in silicon: 2.5 GHz small-signal bandwidth and a driver-limited extinction ratio of 5 dB at 1 gigabit per second.

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